FSD101 Force Sensor Dies for Miniature Force Sensors
FSD101 force sensor die is developed to measure force in a minimized space, for instance miniature force sensors or robot applications.
Thanks to MEMS technology, FSD101 sensor die possesses a full Wheatstone bridge circuit of 2.4 kΩ bridge resistance but footprint of only 1.3mm x 1.3mm. As shown in the picture below, the sensor die features the gauge pattern similar to EB-series metal foil strain gauges from BCM SENSOR, and has 5 solder pads as open-bridge configuration.
Detailed dimensions and specifications can be found on the datasheet of FSD101 as linked below:
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