Miniature Full-Bridge Semiconductor Strain Gauges for Force Sensors
BCM SENSOR has successfully develpled a full-bridge semiconductor strain gauge of miniature footprint (only 1.3mm x 1.3mm) as a sensor chip for force measurement.
Thanks to MEMS technology, such sensor chip can realize bridge resistance up to 5kΩ. As shown in the picture below, the chip features the gauge pattern similar to EB-series metal foil strain gauges from BCM SENSOR, and has 5 solder pads as open-bridge configuration.
With this sensor chip, the dimensions of force sensors can be reduced significantly.
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